Publication | Closed Access
XPS analysis of wet chemical etching of GaAs(110) by Br2–H2O: comparison of emersion and model experiments
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Citations
23
References
2000
Year
SemiconductorsSemiconductor TechnologyElectrical EngineeringChemical EngineeringEngineeringXps AnalysisSurface ScienceApplied PhysicsPlasma EtchingWet Chemical EtchingCompound SemiconductorModel Experiments
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