Direct Atomic Layer Deposition of Ternary Ferrites with Various Magnetic Properties

Abstract

Thin films of the ternary oxides nickel ferrite and cobalt ferrite are created by atomic layer deposition (ALD) from the metallocenes and ozone. Their chemical stoichiometry and magnetic properties can be adjusted by the ALD parameters. Cobalt ferrite is crystalline (spinel phase) and ferrimagnetic without postsynthetic thermal treatment.