Calibration of excitonic photoluminescence to determine high aluminum concentrations in silicon

Abstract

Abstract The photoluminescence spectroscopy method for determining the concentration of shallow acceptors or donors in silicon is extended for the case of aluminum. A calibration function of the photoluminescence intensity ratio of the aluminum bound exciton Al TO (BE) and the free exciton I TO (FE) is reported in the aluminum concentration range of 10 15 –10 17 atoms/cm 3 and in the temperature range of 15 K < T < 27 K. It is described as Al TO (BE)/I TO ( FE) = 10 –15.1 × c Al 0.84 × e 5.9meV/ kT . magnified image Dependence of the PL intensity ratio Al TO (BE)/I TO (FE) on the aluminum concentration. The line represents the calibration function. (© 2013 WILEY‐VCH Verlag GmbH & Co. KGaA, Weinheim)