Thermoelectron-enhanced micrometer-scale plasma generation

Abstract

The use of thermoelectrons allowed easy generation of a micrometer-scale very high-frequency plasma (thermoelectron-enhanced micrometer-scale plasma) in a fine capillary, with an inner diameter of approximately 120 μm. A tungsten wire, whose diameter was 25 μm, inserted into the region was used to provide thermoelectrons. Approximately 5 W of power was sufficient to sustain this plasma. The plasma was very stable and the discharge continued for at least 60 min.