Publication | Closed Access
Ion beam synthesis of deep buried NiSi2 layers in silicon by 6 MeV Ni implantation
20
Citations
8
References
1991
Year
Materials EngineeringElectrical EngineeringIon ImplantationEngineeringPhysicsMev Ni ImplantationNisi2 LayersApplied PhysicsSemiconductor Device FabricationIon BeamSilicon On InsulatorMicroelectronicsIon Beam Synthesis
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