Spectral infrared absorption of CMOS thin film stacks

Abstract

We report the measurement of the relative spectral infrared absorptance of a complete set of CMOS thin film stacks. The measurements were made in the spectrum from 2 /spl mu/m to 14.6 /spl mu/m. The thin film stacks are used in micromachined thermal infrared sensors. The presented data allow more precise modeling of these sensors.