Publication | Open Access

Wafer-level fabrication process for fully encapsulated micro-supercapacitors with high specific energy

Materials ScienceElectrical EngineeringSupercapacitorsEngineeringWafer Scale ProcessingHybrid CapacitorMicrofabricationEnergy StorageWafer-level Fabrication ProcessHigh Specific EnergyEnergy Storage DeviceSupercapacitorElectronic PackagingMicroelectronicsElectrochemical Double Layer Capacitor