Concepedia

Inspection applications with higher electron beam energies

D.R. Norman, James L. Jones, W.Y. Yoon, K.J. Haskell, James W. Sterbentz, J.M. Zabriskie, A. Hunt, F. Harmon, Mathew T. Kinlaw

Nuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and Atoms · 2005 · 16 citations · 0 references

DOI

Concepts