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Structural and optical properties of low-temperature ZnO films grown by atomic layer deposition with diethylzinc and water precursors

Materials ScienceMaterials EngineeringIi-vi SemiconductorOptical MaterialsEngineeringNanotechnologyOptical PropertiesSurface ScienceApplied PhysicsOxide ElectronicsWater PrecursorsChemistryThin FilmsChemical Vapor DepositionAtomic Layer DepositionThin Film Processing