Wide and continuous wavelength tuning in a vertical-cavity surface-emitting laser using a micromachined deformable-membrane mirror

Abstract

Continuous wavelength tuning of 15 nm was achieved micro-electromechanically in an InGaAs/AlGaAs vertical-cavity surface-emitting laser operating near 960 nm. The device utilizes a micromachined deformable-membrane top mirror suspended by an air gap above a p-i-n diode quantum well active region and bottom mirror. Applied membrane-substrate bias produces an electrostatic force which reduces the air gap thickness and therefore tunes the lasing wavelength. Typical tuning bias ranged between 15 and 23 V, and the minimum threshold current was 35 mA for pulsed room-temperature operation.