AuI and AgI Complexes with Tertiary Phosphines and Perfluorinated Carboxylates as Precursors for CVD of Gold and Silver

Abstract

Gold is an excellent contact, connect, and wiring material for microelectronic devices,while silver is of interest for optics, superconducting, and magnetic applications. However, the usual precursors for these materials are difficult to synthesize and handle. This work reports on a new group of precursors based on complexes of AuI and AgI with tertiary phosphines and perfluorinated carboxylates. It is shown that the quality of the films obtained depends on the length of the perfluorinated chain as well as the deposition temperature.