Publication | Closed Access
Quantitative carrier lifetime measurement with micron resolution
56
Citations
30
References
2010
Year
EngineeringMeasurementMicroscopyEducationIntegrated CircuitsCarrier LifetimeSemiconductorsInstrumentationSpatial ResolutionSemiconductor TechnologyHardware ReliabilityCrystalline DefectsPhysicsIntrinsic ImpurityDefect FormationSemiconductor Device FabricationDevice ReliabilitySilicon DebuggingMicron ResolutionApplied PhysicsCircuit ReliabilityHigh Spatial Resolution
In the last fifteen years the measurement of the spatially resolved carrier lifetime has emerged as a valuable tool for the characterization of silicon wafers and solar cells. In most of the available measurement methods, the spatial resolution is constrained to the order of several 10 to 100 μm by the diffusion length of the charge carriers. In this paper we introduce a contactless quantitative technique to determine the Shockley–Read–Hall lifetime with a spatial resolution of 1 μm. This technique is based on high injection microphotoluminescence spectroscopy and allows a quantitative analysis of microscopic defects such as grain boundaries and metal precipitates by virtue of the high spatial resolution.
| Year | Citations | |
|---|---|---|
Page 1
Page 1