New PACVD-hard material layers for wear protection of high-speed steel

Industrial deposition of binary, ternary, and quaternary nitrides of titanium, zirconium, and aluminum

O. Knotek, W.‐D. Münz, T. Leyendecker · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 1987 · 307 citations

Natural Sciences, Materials Engineering, Materials Science +17

Properties of (Ti1−<i>x</i>Al<i>x</i>)N coatings for cutting tools prepared by the cathodic arc ion plating method

Yoshihiro Tanaka, Turgut M. Gür, M. K. Kelly et al. · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 1992 · 107 citations

Natural Sciences, Materials Engineering, Materials Science +17

Comparative studies of TiN and Ti1−xAlxN by plasma-assisted chemical vapor deposition using a TiCl4/AlCl3/N2/H2/Ar gas mixture

Kwang Ho Kim · Thin Solid Films · 1996 · 76 citations

Natural Sciences, Materials Engineering, Materials Science +15

Structure and properties of (Ti1−Al )N films prepared by reactive sputtering

Yusuke Tanaka, Turgut M. Gür, Michael K. Kelly et al. · Thin Solid Films · 1993 · 56 citations

Natural Sciences, Materials Engineering, Materials Science +14

(Ti1−<i>x</i>Al<i>x</i>)N coatings by plasma-enhanced chemical vapor deposition

Sang-Hyeob Lee, Ho-Joon Ryoo, Jung-Joong Lee · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 1994 · 46 citations

Natural Sciences, Materials Engineering, Materials Science +17