Concepedia

Publication | Closed Access

A new vacuum interferometric comparator for calibrating the fine linear encoders and scales

DOI

48

Citations

1

References

2004

Year

Masaji Sawabe, F Maeda, Y Yamaryo, T Simomura, Yoshio Saruki, Tracy S. Kubo, Hisayoshi Sakai, S Aoyagi
Precision Engineering

References

YearCitations

Page 1