Publication | Closed Access
Effect of growth condition on micropipe filling of 4H–SiC epitaxial layer
22
Citations
8
References
2004
Year
Materials EngineeringMaterials ScienceEngineeringApplied PhysicsGrowth ConditionMicropipe FillingSemiconductor Device FabricationEpitaxial GrowthEpitaxial Layer
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