Fano filters based on transferred silicon nanomembranes on plastic substrates

Abstract

We report here the characteristics of surface-normal optical filters based on Fano resonances on patterned single crystalline silicon nanomembranes (SiNMs), which were fabricated and transferred onto transparent plastic substrates using a SiNM wet transfer process. Detailed experimental and theoretical analyses were carried out on the angular- and polarization-dependent transmission properties. The filter transmission is independent of the incident beam polarization under surface-normal conditions. Angle-independent transmission was observed for specific Fano resonances with certain polarizations. The measured angle-dependent transmission agrees well with the simulated transmission and dispersion properties based on the propagation wave-vector analysis.