Publication | Closed Access
Molecular-beam epitaxial group III arsenide alloys: Effect of substrate temperature on composition
22
Citations
10
References
1982
Year
Materials EngineeringMaterials ScienceIon DechannelingIi-vi SemiconductorGrowth TemperatureEngineeringPhysicsSputter-auger SpectroscopySubstrate TemperatureApplied PhysicsCondensed Matter PhysicsSemiconductor MaterialMolecular Beam EpitaxyEpitaxial Growth
Ion dechanneling and sputter-auger spectroscopy have shown the composition of molecular-beam epitaxial ternary group III arsenide alloys to depend upon the growth temperature in a manner consistent with preferential congruent desorption of the more volatile group III element.
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