Concepedia

Plasma enhanced chemical vapor deposition modeling

E. Hyman, K. Tsang, I. Lottati, A. Drobot, Barton Lane, R. S. Post, Herbert H. Sawin

Surface and Coatings Technology · 1991 · 20 citations · 0 references

Concepts

Natural SciencesMaterials SciencePhysicsComputational Fluid DynamicsPlasma PhysicsSurface EngineeringChemical Vapor DepositionHigh-temperature PlasmasPlasma SimulationPlasma-surface InteractionsPlasma-wall InteractionsProcess SimulationPlasma-assisted Chemical Vapor DepositionPlasma-enhanced Chemical Vapor DepositionPlasma-enhanced Deposition