Electrostatic Silicon Microgripper with Low Voltage of Actuation

Abstract

In this paper we present design considerations and results of experiments conducted in order to lower maximum driving voltage of a silicon microgripper's comb-drive actuator. Several different designs have been created, structures were fabricated and tested. We were able to decrease initial 60V driving voltage of previous designs to levels of 9V and 7V with an operating range (gripper tips distance) of 75 μm. The created structures reveal to be fully functional, which has been proved through grasping and manipulation tests.