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Geometrically non-linear analysis of thin-film compliant MEMS via shell and solid elements

Thin-film Compliant MemsEngineeringMicromechanicsMicrofabricationMechanicsSolid ElementsMechanical EngineeringApplied PhysicsNon-linear AnalysisNano Electro Mechanical SystemSolid MechanicsMicroactuatorElectronic PackagingMicroelectronicsMaterial NonlinearitiesMechanics Of MaterialsMicro-electromechanical System