Publication | Closed Access
On the effect of crystallographic orientation on ductile material removal in silicon
76
Citations
12
References
2004
Year
Materials ScienceEngineeringMicrofabricationApplied PhysicsDuctile Material RemovalCrystallographic OrientationSilicon On InsulatorMicrostructure
| Year | Citations | |
|---|---|---|
2007 | 7.8K | |
2006 | 6.5K | |
1990 | 409 | |
2000 | 369 | |
1996 | 320 | |
1992 | 245 | |
1996 | 172 | |
1980 | 130 | |
1990 | 127 | |
1989 | 70 |
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