Determination of the etch rate of silicon in buffered HF using a 31Si tracer method - Concepedia

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Determination of the etch rate of silicon in buffered HF using a 31Si tracer method

22

Citations

1

References

1969

Year

W. Hoffmeister, M. Zügel

The International Journal of Applied Radiation and Isotopes

Electrical EngineeringEngineeringEtch RateApplied PhysicsTracer MethodSemiconductor Device FabricationInstrumentationSilicon On InsulatorMicroelectronicsPlasma EtchingBuffered HfSilicon Debugging

References

	Year	Citations

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