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The influence of the growth process on the film texture of epitaxially nucleated diamond on silicon (001)

Materials ScienceMaterials EngineeringDiamond-like CarbonEngineeringGrowth ProcessMicrofabricationCrystal Growth TechnologySurface ScienceApplied PhysicsFilm TextureThin FilmsSilicon On InsulatorEpitaxial GrowthThin Film ProcessingMicrostructure