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The role of composition, morphology and crystalline structure in the electrochemical behaviour of TiNx thin films for dry electrode sensor materials

Materials ScienceChemical EngineeringEngineeringElectrochemical BehaviourElectrode-electrolyte InterfaceTinx Thin FilmsSurface ElectrochemistrySurface ScienceCrystalline StructureThin Film Process TechnologyThin FilmsElectrochemical InterfaceElectrochemistry