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Identification of single and coupled acceptors in silicon nano-field-effect transistors
29
Citations
10
References
2007
Year
Electrical EngineeringHole Transport MeasurementsIndividual Boron AcceptorsDepth PositionPhysicsEngineeringNanotechnologyElectronic EngineeringNanoelectronicsApplied PhysicsBias Temperature InstabilityCoupled AcceptorsCharge Carrier TransportSemiconductor Device FabricationSilicon On InsulatorMicroelectronicsCharge TransportSemiconductor Device
We performed dopant mediated hole transport measurements to identify the depth position of individual boron acceptors and investigate two-acceptor coupling in silicon-on-insulator nanoscale field-effect transistors at a temperature of 6K. The depth position is qualitatively obtained from the analysis of the acceptor-to-gate capacitances. We also observe signatures of a two-acceptor capacitive coupling in the characteristics of the conductance versus the front and back gate voltages.
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