Thin Solid Films · 1998 · 128 citations · 13 references
Natural SciencesMaterials EngineeringMaterials ScienceOptical MaterialsSemiconductor MaterialsThin FilmsOptical Properties Of SemiconductorsSemiconductor Thin FilmsThin Film Electrical PropertiesThin Film Optical PropertiesThin-film DepositionThin-film MaterialsDeposition RateDeposition Rate ControlDeposition Rate EffectsOptical PropertiesSemiconductor Oxide Thin FilmsSubstrate Temperature EffectsSurface Optical PropertiesThin-film Optoelectronic Materials
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