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The effects of deposition rate and substrate temperature of ITO thin films on electrical and optical properties

Materials ScienceElectrical EngineeringOptical MaterialsEngineeringOptical PropertiesSurface ScienceApplied PhysicsSubstrate TemperatureIto Thin FilmsSemiconductor MaterialDeposition RateThin FilmsChemical DepositionMicroelectronicsOptoelectronicsChemical Vapor DepositionThin Film Processing