Publication | Closed Access
Theory of the growth of SiO2 in an oxygen plasma
22
Citations
10
References
1983
Year
EngineeringPhysicsOxygen PlasmaNatural SciencesSurface ScienceApplied PhysicsNonthermal PlasmaAtomic PhysicsHydrogenChemistryGas Discharge PlasmaChemical KineticsPlasma Processing
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