Optical readout method based on a narrow-strip filter for microcantilever array sensing

Abstract

An effective optical readout approach based on a narrow-strip filter is presented to detect bends of a bimaterial microcantilever focal plane array, by which light intensity of the image plane (CCD image sensor plane) can be increased and its uniformity on the image plane effectively enhanced. It reduces the noise equivalent temperature difference of the microcantilever focal plane array IR imaging system and improves uniformity of the IR images. A comparative experiment is designed to verify effectiveness. The experimental results show that the proposed method has advantages of preferable effect.