Publication | Closed Access
On the modeling of shape evolution in through-mask electrochemical micromachining of complex patterned substrates
11
Citations
17
References
2009
Year
Electrical EngineeringEngineeringMicromachinesFlexible ElectronicsMicrofabricationFabrication TechniqueShape EvolutionThrough-mask Electrochemical MicromachiningMicroscale SystemMicro-electromechanical SystemMicrofluidicsElectrochemistryMicroelectronics
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