Evaluation of optical properties of decorative coatings by spectroscopic ellipsometry

Microstructure modification of TiN by ion bombardment during reactive sputter deposition

I. Petrov, Lars Hultman, Ulf Helmersson et al. · Thin Solid Films · 1989 · 327 citations

Natural Sciences, Materials Engineering, Materials Science +16

Microstructure and physical properties of polycrystalline metastable Ti0.5Al0.5N alloys grown by d.c. magnetron sputter deposition

G. Håkansson, J.‐E. Sundgren, D.C. McIntyre et al. · Thin Solid Films · 1987 · 238 citations

Natural Sciences, Materials Engineering, Materials Science +16

Quantitative auger electron analysis of titanium nitrides

P. T. Dawson, K.K. Tzatzov · Surface Science · 1985 · 137 citations

Natural Sciences, Chemistry, Materials Science +13

Low-energy ion irradiation during film growth for reducing defect densities in epitaxial TiN(100) films deposited by reactive-magnetron sputtering

Lars Hultman, Ulf Helmersson, Scott A. Barnett et al. · Journal of Applied Physics · 1987 · 116 citations

Natural Sciences, Materials Engineering, Materials Science +17

Transmission electron microscopy studies of microstructural evolution, defect structure, and phase transitions in polycrystalline and epitaxial Ti1−xAlxN and TiN films grown by reactive magnetron sputter deposition

Lars Hultman, G. Håkansson, U. Wahlström et al. · Thin Solid Films · 1991 · 89 citations

Natural Sciences, Materials Engineering, Materials Science +17