Observation of Element-Specific Energy-Filtered X-Ray Photoemission Electron Microscopy Images of Au on Ta Using a Wien Filter Type Energy Analyzer

Abstract

We have shown the possibility of a Wien filter as an energy analyzer for the energy-filtered X-ray photoemission electron microscopy (EXPEEM) by obtaining images of Au islands on a Ta substrate using an inner shell photoelectron excited by an X-ray with a photon energy of 2300 eV. When the photoelectron with kinetic energy of nearly 0 eV was selected, brighter Au islands were observed. When the kinetic energies of photoelectrons passing the Wien filter are set at those of Au 3d5/2 and Ta 3p3/2 photoelectrons, the Au and Ta regions appeared brighter, respectively, indicating that the chemical imaging was successful using a high energy X-ray and a Wien filter energy analyzer.