Effect of H2 and O2 plasma etching treatment on the surface of diamond-like carbon thin film - Concepedia

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Effect of H2 and O2 plasma etching treatment on the surface of diamond-like carbon thin film

75

Citations

21

References

2008

Year

Deok Yong Yun, Won Seok Choi, Yong Seob Park, Byungyou Hong

Applied Surface Science

Materials ScienceMaterials EngineeringDiamond-like CarbonEngineeringNanoelectronicsSurface ScienceApplied PhysicsPlasma ProcessingPlasma EtchingSurface ProcessingChemical Vapor Deposition

References

	Year	Citations

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