A high-stroke, high-pressure electrostatic actuator for valve applications

Parasitic charging of dielectric surfaces in capacitive microelectromechanical systems (MEMS)

Jürgen Wibbeler, Günter Pfeifer, Michael Hietschold · Sensors and Actuators A Physical · 1998 · 298 citations

Engineering, Electrical Engineering, Materials Science +16

Breakdown of Gases Below Paschen Minimum: Basic Design Data of High-Voltage Equipment

M. J. Schönhuber · IEEE Transactions on Power Apparatus and Systems · 1969 · 62 citations

Natural Sciences, Electrical Engineering, Materials Science +13

An electrostatically actuated gas valve with an S-shaped film element

K. Satō, Mitsuhiro Shikida · Journal of Micromechanics and Microengineering · 1994 · 55 citations

Engineering, Mechanical Engineering, Actuators +14

A new electrostatic actuator providing improved stroke length and force

J. Branebjerg, Peter Gravesen · 1992 · 54 citations

Engineering, Electrical Engineering, Mechanical Engineering +17