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Influence of ion-bombardment-energy on thin zirconium oxide films prepared by dual frequency oxygen plasma sputtering

DOI

22

Citations

12

References

2006

Year

Yasunori Ohtsu, Yuzuru Hino, T. Misawa, H. Fujita, Ken Yukimura, Morito Akiyama
Surface and Coatings Technology

References

YearCitations

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