Japanese Journal of Applied Physics · 1990 · 44 citations · 6 references
Natural SciencesMaterials SciencePhysicsCrystal StructureElectronic MaterialsMaterials CharacterizationSurface PhysicsSurface SpectroscopyX-ray CrystallographyX-ray OpticsX-ray ProductionX-ray SpectroscopyHeat Treatment EffectsNondestructive AnalysisNondestructive TestingSoft X-ray SpectroscopyValence Electronic StructureX-ray Emission Spectroscopy
A soft X-ray emission spectroscopy (SXES) apparatus was constructed using a grating monochromator. The resolution was sufficient to show differences in valence electronic structures of Si compounds including pure Si crystal. A nondestructive analysis of a Ni/Si(111) specimen with heat treatment was carried out using either a clear difference in Si L 2,3 SXES spectra of Ni silicide and Si single crystals or the fact that the soft X-ray production depth increases in a solid with increasing energy of a primary electron, E p . The electronic and atomic structures of the surface and interface of specimens adopted were clarified with E p varying between 1.5 and 10 keV.
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Microscopic properties and behavior of silicide interfaces
Gary W. Rubloff · Surface Science · 1983 · 162 citations
On the structure of the laser irradiated Si(111)-(1 × 1) surface
R. M. Tromp, E. J. van Loenen, Motohiro Iwami et al. · Solid State Communications · 1982 · 99 citations
M. Iwami, M. Kusaka, Masaaki Hirai et al. · Nuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and Atoms · 1988 · 13 citations