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Structural and optical properties of a-SiCN thin film synthesised in a microwave plasma at constant temperature and different flow of CH4 added to HMDSN/N2/Ar mixture

Materials ScienceOptical MaterialsEngineeringOptical PropertiesMicrowave PlasmaApplied PhysicsChemical Vapor DepositionA-sicn Thin FilmOptoelectronicsPlasma ProcessingCarbide