Novel Nano-Column and Nano-Flower Arrays by Glancing Angle Deposition

Abstract

In this letter, we report a method to fabricate nano-column arrays with different shapes and in-plane orientations by glancing angle deposition. By changing the rate of the rotation during each revolution, we can fabricate nano-columns with circular, elliptical, triangle, rectangular, and pentagon shapes. Depending on the nucleation sites, we can even fabricate flowerlike nano-columns. This method has potential application to produce 3-D lattice.