Journal of Materials Science · 2006 · 28 citations · 18 references
Natural SciencesMaterials EngineeringMaterials ScienceElectronic MaterialsMaterials CharacterizationThin FilmsPolymer Thin FilmsThin Film Mechanical PropertiesThin Film StrainFilm StrainFilm StressPolyimidesSpecimen Preparation For MicroscopyStress Measurement
18
Mechanical properties of thin films
William D. Nix · Metallurgical Transactions A · 1989 · 2.5K citations
Natural Sciences, Materials Engineering, Materials Science +15