Maskless fabrication of field-emitter array by focused ion and electron beam

Abstract

Niobium-gated field-emitter arrays with Pt tips were fabricated using focused ion and electron beams. A promising approach, based on a two-step etch process in a Nb/SiO2/Si structure, has been implemented for the suppression of beam-induced damage and contamination in the processed area during the production of the gate openings. Only the top Nb layer was removed for gate openings by physical sputtering using the focused ion beam. The underlying SiO2 was subsequently removed by wet etching. Deposition of Pt pillars into these gate openings using electron-beam-induced chemical reaction resulted in field emission at an applied gate bias of 50 V even without any thermal annealing process.