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A Level Set Approach to a Unified Model for Etching, Deposition, and Lithography I: Algorithms and Two-Dimensional Simulations

Geometric ModelingEngineeringTwo-dimensional SimulationsBeam LithographyNatural SciencesFabrication TechniqueNumerical SimulationApplied PhysicsComputer-aided DesignLevel Set ApproachUnified ModelComputational MechanicsComputational GeometryPlasma Etching3D PrintingNanolithography MethodMultiscale Modeling