Applied Physics B · 2003 · 19 citations · 13 references
Electrical EngineeringEngineeringLaser-induced BreakdownLaser-plasma InteractionLaser AblationPulse PowerHigh-power LasersLaser Frequency Stabilization
13
Laser-Focused Atomic Deposition
Jabez J. McClelland, R. E. Scholten, E. C. Palm et al. · Science · 1993 · 400 citations
Using light as a lens for submicron, neutral-atom lithography
G. Timp, R. E. Behringer, D. M. Tennant et al. · Physical Review Letters · 1992 · 371 citations
Optical Materials, Engineering, Electron-beam Lithography +16