Deposition of TiO2 thin films by plasma-enhanced decomposition of tetraisopropyltitanate - Concepedia

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Deposition of TiO2 thin films by plasma-enhanced decomposition of tetraisopropyltitanate

61

Citations

13

References

1991

Year

H.J. Frenck, W. Kulisch, M. Kuhr, Rainer Kassing

Thin Solid Films

Materials EngineeringMaterials ScienceEngineeringOxide ElectronicsSurface ScienceApplied PhysicsThin FilmsTio2 Thin FilmsChemical DepositionChemical Vapor DepositionThin Film Processing

References

	Year	Citations

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