Study of very low airborne particle count in clean-unit system platform

Abstract

Cleanliness of a clean-unit system platform consisting of multiply connectable clean boxes with feedback loop is studied and the time dependence of particle count is clarified experimentally and theoretically in order to achieve highly clean environment. Based on this analysis, we have demonstrated airborne particle counts as low as 5particles∕ft3 for the diameter of 0.1μm, 0.6 particles for 0.2μm, and 0.01 particles for 0.5μm by a reduction of particle density coming out from the in-wall in the system. The clean-unit system with feedback loop can serve as a platform for cross-disciplinary experiments and production for fields such as nanotechnologies and biotechnologies.