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Calibration of AFM cantilever stiffness: a microfabricated array of reflective springs

EngineeringMicromechanicsMicromachinesMicrofabricationMechanicsMicrofabricated ArrayMechanical EngineeringAfm Cantilever StiffnessReflective SpringsMicroactuatorMechanics Of MaterialsMicro-electromechanical System