Publication | Closed Access
Oxygen transport analysis in Czochralski silicon melt by considering the oxygen evaporation from the melt surface
52
Citations
7
References
1995
Year
Materials EngineeringMaterials ScienceEngineeringSurface ScienceApplied PhysicsOxygen EvaporationMelt SurfaceThermodynamicsCzochralski Silicon MeltAmorphous SolidSilicon On Insulator
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