Concepedia

The properties of diamond-like carbon films prepared by r.f. discharges

Ki Woong Whang, Hyunhyuk Tae

Thin Solid Films · 1991 · 18 citations · 11 references

DOI

Concepts

References

11

rf-plasma deposited amorphous hydrogenated hard carbon thin films: Preparation, properties, and applications

A. Bubenzer, B. Dischler, G. B. Brandt et al. · Journal of Applied Physics · 1983 · 500 citations

, , +17

Structure and properties of quasi-amorphous films prepared by ion beam techniques

C. Weißmantel, K. Bewilogua, D. Dietrich et al. · Thin Solid Films · 1980 · 255 citations

, , +14

Some new results on the fabrication of and the mechanical, electrical and optical properties of i-carbon layers

K. Enke · Thin Solid Films · 1981 · 246 citations

, , +15

Deposition of hard and insulating carbonaceous films on an r.f. target in a butane plasma

L. Holland, S.M. Ojha · Thin Solid Films · 1976 · 207 citations

, , +11

Some trends in preparing film structures by ion beam methods

G. Gautherin, Chr. Weißmantel · Thin Solid Films · 1978 · 75 citations

, , +7