Concepedia
International Journal of Machine Tools and Manufacture · 1998 · 49 citations · 2 references
EngineeringMaterials EngineeringMaterials ScienceMaterials ProcessingMechanical Behavior Of MaterialsStructural MaterialsMachiningSurface FinishingBrittle FailureGrindingMachining Finishing
2
Mirror Surface Grinding of Silicon Wafers with Electrolytic In-Process Dressing
H. Ohmori, Tomoyuki Nakagawa · CIRP Annals · 1990 · 331 citations
Engineering, Manufacturing Engineering, Materials Engineering +16
Precision Finishing*
M. C. Shaw · CIRP Annals · 1995 · 51 citations