Performance enhancement of terahertz metamaterials on ultrathin substrates for sensing applications

Hu Tao, Andrew C. Strikwerda, Mengkun Liu, Jessica P. Mondia, Evren Ekmekçi, Kebin Fan, David L. Kaplan, Willie J. Padilla, Xin Zhang, Richard D. Averitt,

Applied Physics Letters · 2010 · 202 citations · 16 references

Concepts

Abstract

We design, fabricate, and characterize split-ring resonator (SRR) based planar terahertz metamaterials (MMs) on ultrathin silicon nitride substrates for biosensing applications. Proof-of-principle demonstration of increased sensitivity in thin substrate SRR-MMs is shown by detection of doped and undoped protein thin films (silk fibroin) of various thicknesses and by monitoring transmission changes using terahertz time-domain spectroscopy. SRR-MMs fabricated on thin film substrates show significantly better performance than identical SRR-MMs fabricated on bulk silicon substrates paving the way for improved biological and chemical sensing applications.

References

16