Analysis of nonlinearity in a high-resolution grating interferometer

Recent advances in displacement measuring interferometry

Norman Bobroff · Measurement Science and Technology · 1993 · 428 citations

Engineering, Physics, Metrology +16

Multilayer modal method for diffraction gratings of arbitrary profile, depth, and permittivity

Lifeng Li · Journal of the Optical Society of America A · 1993 · 333 citations

Natural Sciences, Materials Engineering, Materials Science +11

Determining the residual nonlinearity of a high-precision heterodyne interferometer

Chunyong Yin · Optical Engineering · 1999 · 27 citations

Engineering, Electrical Engineering, Instrumentation +15

High-resolution laser linear encoder with numerical error compensation

Marek Dobosz · Optical Engineering · 1999 · 23 citations

Engineering, Electrical Engineering, Metrology +16

Application of a divergent laser beam in a grating interferometer for high-resolution displacement measurements

Marek Dobosz · Optical Engineering · 1994 · 20 citations

Engineering, Physics, Biomedical Optics +15