Publication | Closed Access
Si nanocrystals by ultra-low-energy ion beam-synthesis for non-volatile memory applications
34
Citations
30
References
2005
Year
Materials ScienceNon-volatile MemoryIon ImplantationEngineeringNanomaterialsNanoelectronicsNanotechnologyApplied PhysicsSi NanocrystalsSemiconductor MemorySilicon On InsulatorPhase Change Memory
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